As one of the largest back-end toll processing company in Korea.
Key control item | Control limit | Frequency | Response | |
---|---|---|---|---|
Particle | 10 Zone | Below 10 (0.3㎛) | 1x / Week | QA |
100 Zone | Below 100 (0.3㎛) | |||
500 Zone | Below 500 (0.3㎛) | |||
Temperature | 24 ± 4 ℃ | 3x / Day | QA | |
Humidity | 50 ± 10 % | |||
De-ionized water | Resistivity | Source - Above 17MΩ | 1x / Month | QA |
Return - Above 16MΩ | ||||
TOC | Below 150ppb | 1x / Quarter | QA | |
Bacteria | Below 5 points | 1x / Month | QA | |
Intensity of illumination | Above 400 Lux | 1x / Quarter | Maintenance |
퓨렉스는 Clean Room의 환경관리를 위해 철저한 입실관리 절차를 준수합니다.
1step
Smock Room입실전 Air shower실시
2step
Clean room 의류 및 부자재는 주기적인 세탁 및 이물측정 실시.
3step
Clean room 입실 전 DI Water를 이용한 손세척.
4step
ESD Gate 를 이용해 최종 ESD 점검 완료 후 입실 가능.
온/습도계로 측정된 값은 실시간으로 중앙통제실로 자동 전달되며, 1HR 간격으로 관측하여 일일보고서로 기록됩니다.
Clean Room Class | Control Particle Size | Cotroll Limit | Shut Down Limit |
---|---|---|---|
10 Class | 0.3 um | < 8 > | 10 |
100 Class | 0.5 um | < 80 | > 100 |
500 Class | 0.5 um | < 400 | > 500 |
* Particle counter를 이용하여 Clean room의 Paticle을 측정합니다. (10 class_Daily /100,500 class_Weekly)
Item | Control Limit |
---|---|
Floor Ground | < 10^9Ω |
Ionizer Decay time | < 10 sec |
Ion balance | < 35 V |
Facility Ground | < 1Ω |
Facility Leakage Current | < 5A |
Equipment Ground | < 1Ω |
Equipment Product ESD | < 200 V |
Work Table/ Shelf Ground | < 10^9Ω |
Work Table/ Shelf Product ESD | < 200 V |
Chiar/Cart Ground | < 10^9Ω |
* ESD control measurement is perfromed by QA,Maint on a monthly basis.
Item | Cotroll Limit | Shut Down Limit |
---|---|---|
Bacteria | < 5 colonies | > 10 colonies |
Resistance | ≥ 17 ㏁ (Input) ≥ 16 ㏁ (Return) |
< 16 ㏁ (Input) < 14 ㏁ (Return) |
TOC | < 150 ppb | > 200 ppb |
Temperature | 23±2˚C | < 20˚C, or > 26˚C |